Input-Output Linearization of a MEMS Loudspeaker Using a Hammerstein Model
* Präsentierender Autor
Zusammenfassung:In this article, the use of a Hammerstein model to predict the linear and nonlinear behavior of a MEMS loudspeaker is discussed. The MEMS loudspeaker under investigation is based on an electrostatic drive system. Apart from that, the underlying physical structure is very complex. That is why a purely data driven black box approach was chosen to model its behavior. The resulting model is parameterized in a way, that it takes into account at least the weak second order nonlinearities resulting from the electrostatic principle.The goal of modeling the linear and nonlinear behavior of the loudspeaker is to perform input-output linearization in a feedforward controller. By reducing the harmonic and intermodulation distortions high sound quality at high sound pressure levels is guaranteed. The principle of the MEMS loudspeaker as well as the modeling procedure and the tasks for linearization are described. Based on simulated and measured total harmonic and intermodulation distortion the feedforward controller is evaluated.